Title :
P1K-5 High Sensitivity Pressure Sensor in the range [0-100mTorr] based on Surface Acoustic Wave Device
Author :
Nicolay, P. ; Elmazria, O. ; Sarry, F. ; Marche, N. ; Bouvot, L.
Author_Institution :
LPMIA, Nancy Univ.
Abstract :
In this paper, we present the first results of a new measurement method using SAW devices as pressure sensor. This method allowed us to reach a threshold precision better than one mTorr at low pressure. Sensibilities of 28 ppm/mTorr have been commonly achieved in the range [0-10 mTorr]. The stability and the repeatability of the measures have been checked. A patent is pending detailing the basic principles of the method. Thus only experimental results are presented here. A discussion about the industrial applicability of that new sensor concludes the paper
Keywords :
pressure sensors; surface acoustic wave sensors; SAW device; pressure sensor; surface acoustic wave device; Acoustic sensors; Acoustic waves; Capacitive sensors; Frequency; Intelligent sensors; Mechanical sensors; Pressure measurement; Stress; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 2006. IEEE
Conference_Location :
Vancouver, BC
Print_ISBN :
1-4244-0201-8
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2006.380
