• DocumentCode
    2354144
  • Title

    A novel field plate structure under high voltage interconnections

  • Author

    Fujishima, Naoto ; Takeda, Hisao

  • Author_Institution
    Fuji Electric Corp.
  • fYear
    1990
  • fDate
    1990
  • Firstpage
    91
  • Lastpage
    96
  • Keywords
    Breakdown voltage; Conductivity; Displays; Electrodes; Epitaxial layers; Fabrication; Isolation technology; Oxidation; Power supplies; Telecommunications;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Power Semiconductor Devices and ICs, 1990. ISPSD '90. Proceedings of the 2nd International Symposium on
  • ISSN
    1063-6854
  • Type

    conf

  • DOI
    10.1109/ISPSD.1990.991066
  • Filename
    991066