DocumentCode

2354497

Title

Application of a proton irridation technique to high voltage thyristors

Author

Shimizu, Y. ; Yokota, T. ; Kohno, I.

Author_Institution

Hitachi, Ltd.

fYear

1990

fDate

1990

Firstpage

231

Lastpage

235

Keywords

Annealing; Anodes; Cathodes; Charge carrier lifetime; Impurities; Protons; Silicon; Surface resistance; Thyristors; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Power Semiconductor Devices and ICs, 1990. ISPSD '90. Proceedings of the 2nd International Symposium on

ISSN

1063-6854

Type

conf

DOI

10.1109/ISPSD.1990.991088

Filename

991088