Title :
Application of a proton irridation technique to high voltage thyristors
Author :
Shimizu, Y. ; Yokota, T. ; Kohno, I.
Author_Institution :
Hitachi, Ltd.
Keywords :
Annealing; Anodes; Cathodes; Charge carrier lifetime; Impurities; Protons; Silicon; Surface resistance; Thyristors; Voltage;
Conference_Titel :
Power Semiconductor Devices and ICs, 1990. ISPSD '90. Proceedings of the 2nd International Symposium on
DOI :
10.1109/ISPSD.1990.991088
