Title :
Novel planar junction termination technique for high voltage power devices
Author :
Tockmeier, T.S. ; Roggwiller, P.
Author_Institution :
ABB Asea Brown Boveri Corporate Research
Keywords :
Aluminum; Anodes; Cathodes; Fabrication; Passivation; Polyimides; Rubber; Silicon; Termination of employment; Voltage;
Conference_Titel :
Power Semiconductor Devices and ICs, 1990. ISPSD '90. Proceedings of the 2nd International Symposium on
DOI :
10.1109/ISPSD.1990.991089
