Sub-nanohenry inductance measurement using a zero-parasitic-inductance probe system

A new inductance measurement method of a sub-nanohenry order is proposed using an LCR meter. Since parasitic inductances of probes usually decreases the measurement accuracy, we developed two types of special probes to minimize such parasitic inductances. The new measurement methods have special merits, such as separate measurements of each trace and a high spatial resolution. They also enable measurements of inductances not only for simple traces, but also for combined trace-and-sheet conductor systems. The results measured proved to be in good agreement with our electro-magnetic simulator. The eddy current effect was successfully demonstrated by using this method