Title :
Microwave characterization of flip-chip MMIC components
Author :
Marks, R.B. ; Jargon, J.A. ; Pao, C.K. ; Wen, Cheng P.
Author_Institution :
Nat. Inst. of Stand. & Technol., Boulder, CO, USA
Abstract :
We apply custom calibration standards and software to the accurate on-wafer measurement of MIM capacitors and spiral inductors on flip-chip coplanar-waveguide MMICs. We suggest equivalent circuit models and document their deficiencies. The results are applicable to the development of an accurate CAD database
Keywords :
MMIC; coplanar waveguides; equivalent circuits; flip-chip devices; integrated circuit measurement; microwave measurement; CAD database; MIM capacitors; custom calibration standards; equivalent circuit models; flip-chip coplanar-waveguide MMIC components; microwave characterization; on-wafer measurement; software; spiral inductors; Calibration; Databases; Equivalent circuits; Inductors; MIM capacitors; MMICs; Measurement standards; Software measurement; Software standards; Spirals;
Conference_Titel :
Electronic Components and Technology Conference, 1995. Proceedings., 45th
Conference_Location :
Las Vegas, NV
Print_ISBN :
0-7803-2736-5
DOI :
10.1109/ECTC.1995.514406
