Title :
Determination of frequency dependent transmission line parameters on product related on chip test line structures using S-parameter measurements
Author :
Winkel, Thomas-Michael ; Ktata, M.F. ; Ludwig, Thomas ; Schettler, Helmut ; Grabinski, Hartmut ; Klink, Erich
Author_Institution :
IBM Entwicklungs GmbH, Boblingen, Germany
Abstract :
The frequency dependent propagation constant, characteristic impedance as well as the R, L, C and G parameters are determined from on chip S-parameter measurements. The transmission line test structures are embedded in a multi layer test chip. Measurement limitations due to a non ideal chip environment are shown and discussed. Measured and simulated results show a very good agreement.
Keywords :
S-parameters; integrated circuit interconnections; integrated circuit measurement; transmission lines; 5 GHz; S-parameter measurements; characteristic impedance; embedded transmission lines; frequency dependent transmission line parameters; multilayer test chip; on chip test line structures; propagation constant; Calibration; Frequency dependence; Frequency measurement; Impedance; Probes; Propagation constant; Scattering parameters; Semiconductor device measurement; Testing; Transmission line measurements;
Conference_Titel :
Electrical Performance of Electronic Packaging, 2003
Conference_Location :
Princeton, NJ, USA
Print_ISBN :
0-7803-8128-9
DOI :
10.1109/EPEP.2003.1250008
