Determination of frequency dependent transmission line parameters on product related on chip test line structures using S-parameter measurements

Author

Winkel, Thomas-Michael ; Ktata, M.F. ; Ludwig, Thomas ; Schettler, Helmut ; Grabinski, Hartmut ; Klink, Erich

Author_Institution

IBM Entwicklungs GmbH, Boblingen, Germany

fYear

2003

fDate

27-29 Oct. 2003

Firstpage

97

Lastpage

100

Abstract

The frequency dependent propagation constant, characteristic impedance as well as the R, L, C and G parameters are determined from on chip S-parameter measurements. The transmission line test structures are embedded in a multi layer test chip. Measurement limitations due to a non ideal chip environment are shown and discussed. Measured and simulated results show a very good agreement.

Keywords

S-parameters; integrated circuit interconnections; integrated circuit measurement; transmission lines; 5 GHz; S-parameter measurements; characteristic impedance; embedded transmission lines; frequency dependent transmission line parameters; multilayer test chip; on chip test line structures; propagation constant; Calibration; Frequency dependence; Frequency measurement; Impedance; Probes; Propagation constant; Scattering parameters; Semiconductor device measurement; Testing; Transmission line measurements;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Performance of Electronic Packaging, 2003

Conference_Location

Princeton, NJ, USA

Print_ISBN

0-7803-8128-9

Type

conf

DOI

10.1109/EPEP.2003.1250008

Filename

1250008