Title :
P2K-2 Sensitivity Considerations in Localized Mass Detection Based on Thin-Film Bulk Acoustic Wave Resonators
Author :
Campanella, Humberto ; Esteve, Jaume ; Montserrat, J. ; Romano-Rodriguez, Albert ; Uranga, Arantxa ; Abadal, Gabriel ; Barniol, Nuria
Author_Institution :
Dept. of Microsystems & Nanotech., Centro Nacional de Microelectron., Bellaterra
Abstract :
Sensitivity and responsivity analysis is performed on a localized-mass sensor based on thin-film bulk acoustic resonator (FBAR), intended for bio-molecular applications. Three kinds of experiments have been carried-out, in order to test the influence of the contact area and electrode-location of the loading mass. Beginning from a first experiment in which the loading mass is a FIB-deposited squared-shaped composite of C/Pt/Ga as small as 1.5 times 1.5 mum2, through several experiments in which area and mass is changed, responsivities running from 10-19 g/Hz are achieved
Keywords :
acoustic measurement; acoustic resonators; biosensors; composite materials; C-Pt-Ga; FIB-deposited composite; biomolecular applications; loading mass; localized mass detection; mass sensors; responsivity analysis; sensitivity analysis; squared-shaped composite; thin-film bulk acoustic wave resonators; Acoustic applications; Acoustic sensors; Acoustic signal detection; Acoustic testing; Acoustic waves; Biosensors; Film bulk acoustic resonators; Performance analysis; Thin film sensors; Transistors;
Conference_Titel :
Ultrasonics Symposium, 2006. IEEE
Conference_Location :
Vancouver, BC
Print_ISBN :
1-4244-0201-8
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2006.460
