Title :
A 30-V, 75-mΩ*mm2 power MOSFET for intelligent driver LSIs
Author :
Morikawa, Masatoshi ; Sakamoto, Kozo ; Uchida, Ken ; Koda, Toyomasa ; Satonaka, Koichiro ; Yoshida, Isao
Author_Institution :
Hitachi, Ltd.
Keywords :
Area measurement; BiCMOS integrated circuits; Electric resistance; Fabrication; Large scale integration; MOSFET circuits; Power MOSFET; Solid modeling; Surface resistance; Voltage;
Conference_Titel :
Power Semiconductor Devices and ICs, 1992. ISPSD '92. Proceedings of the 4th International Symposium on
DOI :
10.1109/ISPSD.1992.991252