Title :
Analysis and improvement of dynamic characteristic of 3-axis nano stage
Author :
Kim, Choong ; Lee, Kang-Nyung ; Lee, Dong-Ju ; Park, No-Cheol ; Park, Young-Pil ; Park, Jung-Woo ; Lee, Dong-Jin ; Lee, Moon Gu ; Choi, Hyoung Gil ; Lee, Suk-Won
Author_Institution :
Center for Inf. Storage Devices, Yonsei Univ., Seoul, South Korea
Abstract :
The precision positioning system requires robust design to obtain enough bandwidth. Therefore, the subresonance occurred by the disaccord of the force center and the mass center should be oppressed. It is necessary to move the flexible mode to a higher frequency. In this paper, the 3-axis nano stage was proposed and dynamic characteristics was improved by design of experiments (DOE).
Keywords :
actuators; design of experiments; finite element analysis; position control; 3-axis nano stage; design of experiments; dynamic characteristic; finite element analysis; force center; mass center; precision positioning system; robust design; subresonance; voice coil motor; Acceleration; Actuators; Bandwidth; Coils; Finite element methods; Frequency; Robustness; Semiconductor device manufacture; Testing; US Department of Energy;
Conference_Titel :
Mechatronics, 2005. ICM '05. IEEE International Conference on
Conference_Location :
Taipei
Print_ISBN :
0-7803-8998-0
DOI :
10.1109/ICMECH.2005.1529223
