DocumentCode
2356889
Title
Analysis and improvement of dynamic characteristic of 3-axis nano stage
Author
Kim, Choong ; Lee, Kang-Nyung ; Lee, Dong-Ju ; Park, No-Cheol ; Park, Young-Pil ; Park, Jung-Woo ; Lee, Dong-Jin ; Lee, Moon Gu ; Choi, Hyoung Gil ; Lee, Suk-Won
Author_Institution
Center for Inf. Storage Devices, Yonsei Univ., Seoul, South Korea
fYear
2005
fDate
10-12 July 2005
Firstpage
34
Lastpage
38
Abstract
The precision positioning system requires robust design to obtain enough bandwidth. Therefore, the subresonance occurred by the disaccord of the force center and the mass center should be oppressed. It is necessary to move the flexible mode to a higher frequency. In this paper, the 3-axis nano stage was proposed and dynamic characteristics was improved by design of experiments (DOE).
Keywords
actuators; design of experiments; finite element analysis; position control; 3-axis nano stage; design of experiments; dynamic characteristic; finite element analysis; force center; mass center; precision positioning system; robust design; subresonance; voice coil motor; Acceleration; Actuators; Bandwidth; Coils; Finite element methods; Frequency; Robustness; Semiconductor device manufacture; Testing; US Department of Energy;
fLanguage
English
Publisher
ieee
Conference_Titel
Mechatronics, 2005. ICM '05. IEEE International Conference on
Conference_Location
Taipei
Print_ISBN
0-7803-8998-0
Type
conf
DOI
10.1109/ICMECH.2005.1529223
Filename
1529223
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