Simulation and optimization of a micro flow sensor

Author

Xing Guo ; Chunlin Xu ; Shengzhi Zhang ; Yong Xu ; Xin Wu ; Sheng Liu

Author_Institution

Sch. of Mech. & Eng., Huazhong Univ. of Sci. & Technol., Wuhan, China

fYear

2014

fDate

27-30 May 2014

Firstpage

2283

Lastpage

2286

Abstract

In this paper, simulation and optimization of a micro flow sensor is presented. Modeling of the micro flow sensor using ANSYS Fluent for temperature distribution is studied. The detailed structure of the micro flow sensor chip is considered in the simulation model. What´s more, the temperature dependencies of physical properties of air are defined to improve the model precision. As a key parameter, optimized position of thermistor is obtained. The effects of mass flow rate, input power and depth of flow channel on the performance of the micro flow sensor are investigated in detail, thus optimized parameters are obtained. The effect of sensor chip installation error in radial direction of flow channel on temperature distribution of the micro flow sensor is also investigated. At last, comparison of simulation model with and without considering sensor chip structure is conducted.

Keywords

finite element analysis; flow sensors; microchannel flow; microsensors; optimisation; temperature distribution; thermistors; ANSYS Fluent; air physical property; flow channel; mass flow rate; micro flow sensor chip; model precision; parameter optimization; radial direction; sensor chip installation error; simulation model; temperature distribution; thermistor; Atmospheric modeling; Heat transfer; Heating; Materials; Temperature measurement; Temperature sensors; Thermistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Components and Technology Conference (ECTC), 2014 IEEE 64th

Conference_Location

Orlando, FL

Type

conf

DOI

10.1109/ECTC.2014.6897623

Filename

6897623