Simulation and optimization of a micro flow sensor

In this paper, simulation and optimization of a micro flow sensor is presented. Modeling of the micro flow sensor using ANSYS Fluent for temperature distribution is studied. The detailed structure of the micro flow sensor chip is considered in the simulation model. What´s more, the temperature dependencies of physical properties of air are defined to improve the model precision. As a key parameter, optimized position of thermistor is obtained. The effects of mass flow rate, input power and depth of flow channel on the performance of the micro flow sensor are investigated in detail, thus optimized parameters are obtained. The effect of sensor chip installation error in radial direction of flow channel on temperature distribution of the micro flow sensor is also investigated. At last, comparison of simulation model with and without considering sensor chip structure is conducted.