Title :
CMP CONSUMABLES: Suppliers, applications, performance, and growth
Author_Institution :
Axus Technol. in Cooperation with the TECHCET Group of CA, LLC, Chandler, AZ, USA
Abstract :
This presentation analyzes the CMP consumables sector of the semiconductor, MEMS, nanotechnology, and microfabrication industries. CMP consumables are considered critical factors in the success of the science, and often dominate studies related to the overall Cost of Ownership of the CMP process.
Keywords :
chemical mechanical polishing; CMP consumables; cost of ownership; Companies; Industries; Integrated circuits; Manufacturing; Micromechanical devices; Planarization; Slurries;
Conference_Titel :
Planarization/CMP Technology (ICPT), 2014 International Conference on
Conference_Location :
Kobe
Print_ISBN :
978-1-4799-5556-5
DOI :
10.1109/ICPT.2014.7017305
