DocumentCode
235725
Title
Author index
fYear
2014
fDate
19-21 Nov. 2014
Firstpage
1
Lastpage
7
Abstract
Presents an index of the authors whose articles are published in the conference proceedings record.
fLanguage
English
Publisher
ieee
Conference_Titel
Planarization/CMP Technology (ICPT), 2014 International Conference on
Conference_Location
Kobe, Japan
Print_ISBN
978-1-4799-5556-5
Type
conf
DOI
10.1109/ICPT.2014.7017319
Filename
7017319
Link To Document