Title :
Using a modified Hazop/FMEA methodology for assessing system risk
Author :
Trammell, Steven R. ; Davis, Brett J.
Author_Institution :
Semicond. Products Sector, Motorola Inc., Austin, TX, USA
Abstract :
As semiconductor manufacturing processes become more complex and the costs associated with manufacturing line downtime soar, the reliability of the supporting systems have become a major area of focus. Preventive and predictive maintenance, real time system status monitoring, and periodic inspections are typical methods used to help reduce unexpected system failures. Although these methods are proactive, they are typically applied on the basis of perceived risk or solely on the historical perspective of the designer or owner. Utilization of a robust and flexible system risk assessment method early in the design phase is a highly effective approach to increasing system up time and identifying design weaknesses. This paper will present a risk assessment approach based on strengths of both hazard and operability study (Hazop) and failure mode and effects analysis (FMEA) methodologies
Keywords :
failure analysis; manufacture; production; reliability; risk management; FMEA; Hazop; Preventive maintenance; failure mode and effects analysis; hazard and operability study; manufacturing line downtime; periodic inspections; predictive maintenance; real time system status monitoring; risk assessment method; semiconductor manufacturing processes; supporting systems reliability; Condition monitoring; Costs; Inspection; Manufacturing processes; Predictive maintenance; Real time systems; Risk management; Robustness; Semiconductor device manufacture; Semiconductor device reliability;
Conference_Titel :
Engineering Management for Applied Technology, 2001. EMAT 2001. Proceedings. 2nd International Workshop on
Conference_Location :
Austin, TX
Print_ISBN :
0-7695-1324-7
DOI :
10.1109/EMAT.2001.991310