Miniaturized OCT system with optimized housing design

Author

Sheng, Kelvin Chen Wei ; Aibin, Yu ; Xiaojing, Mu ; Hua, Feng Han ; Wei, Tan Chee

Author_Institution

Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore

fYear

2010

fDate

8-10 Dec. 2010

Firstpage

94

Lastpage

97

Abstract

An optical probe is developed for imaging in an optical coherence tomography (OCT) system and a 3D micro mirror is used for moving the beam from the source to the point of interest on the sample. The completed probe uses a dual axis electro-thermal actuated mirror, silicon optical bench (SiOB)-based probe. The silicon optical bench is designed and micro machined to assemble the fiber, lens and the 3D micro mirror device and inserted into a bio-compatible circular housing. A honey combed structure is fabricated to assist in prevent bridging of the solder balls during reflow. A toroidal lens is being use to correct the beam shape caused by the compatible circular housing.

Keywords

electric actuators; electronics packaging; honeycomb structures; lenses; micro-optomechanical devices; micromachining; micromirrors; optical fibres; optical tomography; probes; silicon; solders; 3D micro mirror; MEMS; biocompatible circular housing; dual axis electrothermal actuated mirror; honey combed structure; housing design; micromachining; miniaturized OCT system; optical coherence tomography; optical fiber; optical probe; optimized housing design; silicon optical bench; solder balls; toroidal lens;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics Packaging Technology Conference (EPTC), 2010 12th

Conference_Location

Singapore

Print_ISBN

978-1-4244-8560-4

Electronic_ISBN

978-1-4244-8561-1

Type

conf

DOI

10.1109/EPTC.2010.5702613

Filename

5702613