Tunable band-stop filter based on single RF MEMS capacitive shunt switch with meander arm inductance

This paper presents a novel high-frequency filter concept based on a single MEMS capacitive shunt structure using meander arm inductance. Tuning ranges of the central frequency in the order of 55% are experimentally demonstrated for filters operating between 13.5 GHz to 30 GHz and 17 GHz to 37 GHz. A low transmission loss of 0.44 dB and a rejection level of -20.5 dB at 17 GHz are reported. The outstanding tuning range is due to the simultaneous tunability of the MEMS capacitive switch (with a capacitance ratio Gt 1.5) and the exploitation of the voltage-controlled capacitance coupling between the meander arm inductance and the substrate.