Title :
Predictive yield modeling for reconfigurable memory circuits
Author :
Ciplickas, Dennis J. ; Li, Xiaolei ; Vallishayee, Rakesh ; Strojwas, Andrzej ; Williams, Randy ; Renfro, Michael ; Nurani, Raman
Author_Institution :
PDF Solutions Inc., San Jose, CA, USA
Abstract :
This paper presents a novel approach to the modeling of defect related yield losses in reconfigurable memory circuits. The proposed approach is based on the critical area extracted from the memory layout and the in-line defect inspection data. A complete chip level yield model that takes into account the actual redundancy scheme is presented, with the demonstration of excellent accuracy between the model prediction and bitmap data from an actual flash memory product manufactured by Intel Corporation
Keywords :
flash memories; inspection; integrated circuit layout; integrated circuit modelling; integrated circuit reliability; integrated circuit yield; integrated memory circuits; reconfigurable architectures; redundancy; bitmap data; chip level yield model; critical area; defect related yield loss; defect related yield loss modelling; flash memory product; in-line defect inspection data; memory layout; model prediction; predictive yield modeling; reconfigurable memory circuits; redundancy scheme; Automatic testing; Built-in self-test; Circuits; Data analysis; Data mining; Inspection; Loss measurement; Predictive models; Random access memory; Semiconductor device manufacture;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1998. 1998 IEEE/SEMI
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-4380-8
DOI :
10.1109/ASMC.1998.731368