Title :
P3O-2 Fast Evaluation of Piezoelectric Aluminum Nitride Films by Infrared Optical Techniques
Author :
Clement, M. ; Iborra, E. ; Olivares, J. ; Gonzalez-Castilla, S. ; Sanz-Hervas, A. ; Vergara, L. ; Sangrador, J.
Author_Institution :
Grupo de Microsistemas y Materiales Electronicos, Univ. Politecnica de Madrid
Abstract :
Aluminum nitride (AlN) thin films of different crystal qualities have been evaluated by Fourier transform infrared spectrophotometry (FTIR) in the transmittance and reflectance modes. The positions and intensities of the longitudinal optical (LO) and transverse optical (TO) modes in the IR spectra have been correlated with the morphological properties of the films, assessed by X-ray diffraction (XRD) and atomic force microscopy (AFM), and with their piezoelectric response. FTIR proves itself to be a very convenient technique for the fast evaluation of AlN films for their application in electroacoustic devices
Keywords :
Fourier transform spectra; X-ray diffraction; acoustoelectric devices; aluminium compounds; atomic force microscopy; infrared spectra; piezoelectric thin films; AFM; AlN; FTIR; Fourier transform infrared spectrophotometry; X-ray diffraction; XRD; atomic force microscopy; crystal quality; electroacoustic devices; film morphology; infrared optical techniques; infrared spectra; longitudinal optical mode; piezoelectric aluminum nitride films; reflectance mode; transmittance mode; transverse optical mode; Aluminum nitride; Atom optics; Atomic force microscopy; Fourier transforms; Infrared spectra; Optical films; Optical microscopy; Piezoelectric films; Reflectivity; X-ray diffraction;
Conference_Titel :
Ultrasonics Symposium, 2006. IEEE
Conference_Location :
Vancouver, BC
Print_ISBN :
1-4244-0201-8
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2006.578
