DocumentCode
2357967
Title
A membrane supported on-chip spiral antenna
Author
Sedaghat-Pisheh, H. ; Shahabadi, M. ; Mohajerzadeh, S.
Author_Institution
Thin Film Lab, School of Electrical and Computer Engineering, Faculty of Engineering, Campus No. 2, University of Tehran, North Kargar Ave., Iran
fYear
2006
fDate
6-10 Nov. 2006
Firstpage
1
Lastpage
4
Abstract
Design, simulation, and fabrication of a novel broadband suspended coplanar waveguide (CPW)-fed spiral on-chip antenna using silicon micromachining will be presented. The antenna is designed for the unlicensed 60 GHz band, i.e., 57¿64 GHz for millimeter-wave applications. To maximize the radiation efficiency of the antenna, we have used silicon bulk micromachining method to remove the unwanted regions of the substrate. Finally, simulation results of the antenna using Finite Integral Technique (FIT) will be presented.
Keywords
Bandwidth; Biomembranes; Coplanar waveguides; Etching; Frequency; Micromachining; Silicon; Spirals; Substrates; System-on-a-chip;
fLanguage
English
Publisher
ieee
Conference_Titel
Antennas and Propagation, 2006. EuCAP 2006. First European Conference on
Conference_Location
Nice
Print_ISBN
978-92-9092-937-6
Type
conf
DOI
10.1109/EUCAP.2006.4584694
Filename
4584694
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