Title :
A membrane supported on-chip spiral antenna
Author :
Sedaghat-Pisheh, H. ; Shahabadi, M. ; Mohajerzadeh, S.
Author_Institution :
Thin Film Lab, School of Electrical and Computer Engineering, Faculty of Engineering, Campus No. 2, University of Tehran, North Kargar Ave., Iran
Abstract :
Design, simulation, and fabrication of a novel broadband suspended coplanar waveguide (CPW)-fed spiral on-chip antenna using silicon micromachining will be presented. The antenna is designed for the unlicensed 60 GHz band, i.e., 57¿64 GHz for millimeter-wave applications. To maximize the radiation efficiency of the antenna, we have used silicon bulk micromachining method to remove the unwanted regions of the substrate. Finally, simulation results of the antenna using Finite Integral Technique (FIT) will be presented.
Keywords :
Bandwidth; Biomembranes; Coplanar waveguides; Etching; Frequency; Micromachining; Silicon; Spirals; Substrates; System-on-a-chip;
Conference_Titel :
Antennas and Propagation, 2006. EuCAP 2006. First European Conference on
Conference_Location :
Nice
Print_ISBN :
978-92-9092-937-6
DOI :
10.1109/EUCAP.2006.4584694
