Title :
FIB-SEM investigation and auto-metrology of polymer-microlens/CFA arrays of CMOS image sensor
Author :
Sharma, Parmanand ; Tai Shan Chiu ; Biring, Sajal ; Te-Fu Chang ; Chih-Hsun Chu ; Yong-Fen Hsieh
Author_Institution :
FIB-TEM & R&D Div., Mater. Anal. Technol. Inc., Hsinchu, Taiwan
fDate :
June 30 2014-July 4 2014
Abstract :
We report sample preparation and FIB-SEM investigation of polymer-microlens/CFA arrays of CMOS image sensor for investigating possible nanoscale voids. Polymer staining was employed to delineate boundaries of color filters and microlenses. Newly developed in-house auto-metrology software was used for dimension and uniformity study of SEM images of microlenses.
Keywords :
CMOS image sensors; microlenses; CFA arrays; CMOS image sensor; FIB SEM investigation; autometrology software; color filters; microlenses; nanoscale voids; polymer microlens; polymer staining; Electron beams; Image color analysis; Ion beams; Lenses; Microoptics; Polymers; Scanning electron microscopy;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2014 IEEE 21st International Symposium on the
Conference_Location :
Marina Bay Sands
Print_ISBN :
978-1-4799-3931-2
DOI :
10.1109/IPFA.2014.6898142
