Title :
Library setup for epitaxial layer dopant profile using spreading resistance profiling analysis
Author :
Lim Saw Sing ; Lim Chan Way
Author_Institution :
Infineon Technol. (Kulim) Sdn Bhd, Kulim, Malaysia
fDate :
June 30 2014-July 4 2014
Abstract :
The paper describes an approach to establish library for epitaxial layer monitoring using spreading resistance profiling (SRP) technique. This library can be used as complementary technique for conventional epitaxial monitoring such as inline four-point probe (FPP) or surface charge profiler (SCP).
Keywords :
doping profiles; epitaxial layers; probes; surface charging; FPP; SCP; SRP technique; epitaxial layer dopant profile; epitaxial layer monitoring; inline four-point probe; library setup; spreading resistance profiling analysis; surface charge profiler; Decision support systems; Failure analysis; Integrated circuits;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2014 IEEE 21st International Symposium on the
Conference_Location :
Marina Bay Sands
Print_ISBN :
978-1-4799-3931-2
DOI :
10.1109/IPFA.2014.6898167
