Title :
Intelligent line monitor: maximum productivity through an integrated and automated line monitoring strategy
Author :
Pilon, Tom ; Burns, Mark ; Fischer, Verlyn ; Saunders, Matthew
Author_Institution :
Microelectron. Div., IBM Corp., Essex Junction, VT, USA
Abstract :
This paper describes an intelligent line monitor system and highlights the features which make it superior to conventional line monitor systems. By citing examples from an IBM 0.25 μm technology fabricator, we show that an integrated and automated line monitoring strategy reduces time-to-results, provides a low cost-of-ownership, and delivers a short time to return-on-investment. The natural expansion and growth possibilities of such a system are also explored
Keywords :
automatic optical inspection; computerised monitoring; fault location; integrated circuit measurement; integrated circuit yield; process monitoring; quality control; IBM technology fabricator; automated line monitoring strategy; cost-of-ownership; integrated line monitoring strategy; intelligent line monitor system; line monitor systems; productivity; return-on-investment; system expansion; Computerized monitoring; Costs; Inspection; Investments; Microelectronics; Optical microscopy; Productivity; Protection; Scanning electron microscopy; Semiconductor device manufacture;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1998. 1998 IEEE/SEMI
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-4380-8
DOI :
10.1109/ASMC.1998.731411
