Multiphysics modeling and design of ultralarge multiwafer MOVPE reactor for group III-nitride light emitting diodes

A multiphysics modeling and design has been performed for the world´s largest Metal Organic Vapor Phase Epitaxy (MOVPE) reactor by combining Theory of Inventive Problem Solving (TRIZ) for concept design, Design for Six Sigma (DFSS) for shape optimization, and Computer-Aided Engineering (CAE) simulations of multi-scale from atomic to macro scales. Numerical simulations considering gas phase chemical reactions and surface chemistry have been thoroughly verified by comparing with experimental measurements from various MOVPE reactors. As a preliminary study, two transparent mock-up models for the ultra-large MOVPE reactor were made in real scale and their internal flow fields were measured by laser Doppler velocimetry (LDV). A RF induction heater was also simulated by coupling the thermo-fluid field and electro-magnetic field together. Since the MOVPE reactor was manufactured, numerous tests for high-temperature reliability and temperature uniformity have repeatedly been conducted. Consequently, these multidisciplinary approaches have been successfully applied to develop the ultralarge MOVPE reactor for group III-nitride light emitting diode (LED).