Title :
Diamond and carbon nanorubes and their applications to MEMS and NEMS
Author :
Tzeng, Y. ; Liu, Y.K.
Author_Institution :
Auburn Univ., AL, USA
Abstract :
Outstanding mechanical, thermal, optical, chemical, electrical, and biocompatible properties of diamond and carbon nanotubes, and their implication to and current status of practical applications to micro- and nano-electromechanical systems (MEMS/NEMS) are discussed. State-of-the-art manufacturing technologies for these materials and related processes for fabrication of high performance MEMS and NEMS are presented.
Keywords :
carbon nanotubes; diamond; micromechanical devices; MEMS; NEMS; carbon nanotubes; diamond nanotubes; micro-electromechanical systems; nano-electromechanical systems; state-of-the-art manufacturing technologies; Biological materials; Biomedical optical imaging; Carbon nanotubes; Chemical technology; Diamond-like carbon; Manufacturing processes; Mechanical factors; Micromechanical devices; Nanoelectromechanical systems; Optical materials;
Conference_Titel :
Mechatronics, 2005. ICM '05. IEEE International Conference on
Conference_Location :
Taipei
Print_ISBN :
0-7803-8998-0
DOI :
10.1109/ICMECH.2005.1529346
