Title :
Automatic probe alignment for atomic force microscope
Author :
Hung, Shao-Kang ; Tsai, Chia-Feng ; Hsu, Yu-Po ; Tzou, Dai-Jie ; Lin, Meng-Hu ; Fu, Li-Chen
Author_Institution :
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
We built an atomic force microscope (AFM) system in combination with a robotic manipulator to help users in two rigorous tasks: to load the probe and to align the optical detection path. A novel z-tracking optical design, which allows vertical probe scan is also proposed. This method enhances the scan speed for massive samples.
Keywords :
atomic force microscopy; manipulators; optical microscopes; spatial variables control; atomic force microscope; automatic probe alignment; optical detection path alignment; probe loading; robotic manipulator; vertical probe scan; z-tracking optical design; Atom optics; Atomic force microscopy; Force sensors; High speed optical techniques; Laser modes; Optical feedback; Optical microscopy; Optical sensors; Rough surfaces; Scanning probe microscopy;
Conference_Titel :
Mechatronics, 2005. ICM '05. IEEE International Conference on
Print_ISBN :
0-7803-8998-0
DOI :
10.1109/ICMECH.2005.1529383
