DocumentCode
2360032
Title
Automatic probe alignment for atomic force microscope
Author
Hung, Shao-Kang ; Tsai, Chia-Feng ; Hsu, Yu-Po ; Tzou, Dai-Jie ; Lin, Meng-Hu ; Fu, Li-Chen
Author_Institution
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
fYear
2005
fDate
10-12 July 2005
Firstpage
909
Lastpage
912
Abstract
We built an atomic force microscope (AFM) system in combination with a robotic manipulator to help users in two rigorous tasks: to load the probe and to align the optical detection path. A novel z-tracking optical design, which allows vertical probe scan is also proposed. This method enhances the scan speed for massive samples.
Keywords
atomic force microscopy; manipulators; optical microscopes; spatial variables control; atomic force microscope; automatic probe alignment; optical detection path alignment; probe loading; robotic manipulator; vertical probe scan; z-tracking optical design; Atom optics; Atomic force microscopy; Force sensors; High speed optical techniques; Laser modes; Optical feedback; Optical microscopy; Optical sensors; Rough surfaces; Scanning probe microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Mechatronics, 2005. ICM '05. IEEE International Conference on
Print_ISBN
0-7803-8998-0
Type
conf
DOI
10.1109/ICMECH.2005.1529383
Filename
1529383
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