Calibration of capacitance in the frequency range up to 1 MHz

This paper describes two different ways to calibrate the capacitance in the high frequency range up to 13 MHz. First, a dual source bridge was configured using two voltage sources and then the ratio of two capacitors was measured in the frequency range from 1 kHz to 1 MHz. The second method known as the Z-matrix method, allowed us to measure the capacitance value up to 13 MHz. The measured values were compared with the reference values calibrated by the PTB and Agilent Technologies, respectively, and they were also compared with each other. The cross-checks showed that both methods are reliable to an order of 10^-5 at 1 MHz.