• DocumentCode
    2360368
  • Title

    Ultra-thin chips and related applications, a new paradigm in silicon technology

  • Author

    Burghartz, Joachim N. ; Appel, Wolfgang ; Harendt, Christine ; Rempp, Horst ; Richter, Harald ; Zimmermann, Martin

  • Author_Institution
    Inst. fur Mikroelektron. Stuttgart (IMS CHIPS), Stuttgart, Germany
  • fYear
    2009
  • fDate
    14-18 Sept. 2009
  • Firstpage
    29
  • Lastpage
    36
  • Abstract
    Ultra-thin chip technology has potential to provide solutions for overcoming bottlenecks in silicon technology and for leading to new applications. This, however, requires new techniques in fabricating very thin wafers or chips, in applying them to device integration processes and in assembly and packaging. Therefore, ultra-thin chips and the related applications represent a new paradigm in silicon technology. The paper highlights the prominent applications of ultra-thin chips, alerts to the related technological issues and compares the candidate enabling technologies.
  • Keywords
    elemental semiconductors; microassembling; semiconductor device packaging; semiconductor devices; semiconductor thin films; silicon; Si; silicon technology; thin wafers; ultrathin chips; Assembly; Endoscopes; Implants; Mechanical factors; Microelectronics; Packaging; Paper technology; Power dissipation; Security; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Device Research Conference, 2009. ESSDERC '09. Proceedings of the European
  • Conference_Location
    Athens
  • ISSN
    1930-8876
  • Print_ISBN
    978-1-4244-4351-2
  • Electronic_ISBN
    1930-8876
  • Type

    conf

  • DOI
    10.1109/ESSDERC.2009.5331441
  • Filename
    5331441