DocumentCode
2360368
Title
Ultra-thin chips and related applications, a new paradigm in silicon technology
Author
Burghartz, Joachim N. ; Appel, Wolfgang ; Harendt, Christine ; Rempp, Horst ; Richter, Harald ; Zimmermann, Martin
Author_Institution
Inst. fur Mikroelektron. Stuttgart (IMS CHIPS), Stuttgart, Germany
fYear
2009
fDate
14-18 Sept. 2009
Firstpage
29
Lastpage
36
Abstract
Ultra-thin chip technology has potential to provide solutions for overcoming bottlenecks in silicon technology and for leading to new applications. This, however, requires new techniques in fabricating very thin wafers or chips, in applying them to device integration processes and in assembly and packaging. Therefore, ultra-thin chips and the related applications represent a new paradigm in silicon technology. The paper highlights the prominent applications of ultra-thin chips, alerts to the related technological issues and compares the candidate enabling technologies.
Keywords
elemental semiconductors; microassembling; semiconductor device packaging; semiconductor devices; semiconductor thin films; silicon; Si; silicon technology; thin wafers; ultrathin chips; Assembly; Endoscopes; Implants; Mechanical factors; Microelectronics; Packaging; Paper technology; Power dissipation; Security; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 2009. ESSDERC '09. Proceedings of the European
Conference_Location
Athens
ISSN
1930-8876
Print_ISBN
978-1-4244-4351-2
Electronic_ISBN
1930-8876
Type
conf
DOI
10.1109/ESSDERC.2009.5331441
Filename
5331441
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