Title :
BAW radiation from LSAW resonators on lithium tantalate
Author :
Knuuttila, J.V. ; Koskela, J. ; Vartiainen, J. ; Salomaa, M.M. ; Hartmann, C.S. ; Plessky, V.P.
Abstract :
We report the first direct measurements of bulk-acoustic waves radiated by a leaky SAW resonator on 36°YX-LiTaO3. The BAW radiation patterns on the backside of the piezoelectric substrate were measured with the help of a scanning laser interferometer probe. The different energy-flow angles into the substrate were obtained as functions of frequency and then used to identify the corresponding bulkwave modes arriving to the substrate bottom. The measured energy-flow angles at different frequencies along with the simulated are reported. In addition, the reflected BAW radiation arriving to the top of the substrate was detected
Keywords :
acoustic wave propagation; lithium compounds; piezoelectric materials; surface acoustic wave resonators; BAW radiation; LSAW resonators; LiTaO3; bulk-acoustic waves; energy-flow angles; piezoelectric substrate; scanning laser interferometer probe; Acoustic propagation; Frequency measurement; Laboratories; Lithium compounds; Optical reflection; Physics; Radio frequency; Surface acoustic wave devices; Surface acoustic waves; Surface waves;
Conference_Titel :
Ultrasonics Symposium, 2001 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
0-7803-7177-1
DOI :
10.1109/ULTSYM.2001.991607
