Title :
MEMS resonator temperature compensation
Author :
Casset, F. ; Durand, C. ; Civet, Y. ; Ollier, E. ; Carpentier, JF ; Ancey, P. ; Robert, P.
Author_Institution :
CEA, MINATEC, Grenoble, France
Abstract :
This paper presents the study of an electromechanical resonator temperature compensation principle. It consists in the use of a coating material presenting opposite properties over temperature compared to the silicon resonator structural material. Simulated results, using the FEM Coventor® software, show the great potential of this CMOS compatible principle for industrial perspectives.
Keywords :
compensation; micromechanical devices; CMOS compatible principle; FEM Coventor software; MEMS resonator temperature compensation; coating material; electromechanical resonator temperature compensation principle; industrial perspectives; resonator structural material; Micromechanical devices; Temperature;
Conference_Titel :
Thermal, Mechanical & Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems (EuroSimE), 2010 11th International Conference on
Conference_Location :
Bordeaux
Print_ISBN :
978-1-4244-7026-6
DOI :
10.1109/ESIME.2010.5464619
