Title :
Manufacturing for design: putting process control in the language of the designer
Author_Institution :
Fairchild Semicond., South Portland, ME, USA
Abstract :
A methodology is presented for evaluation of process control from the designer´s perspective, that of overall electrical performance. Technology tables and a comprehensive set of strategically chosen wafer electrical tests are used to capture and maintain the electrical signature of a process
Keywords :
design for manufacture; integrated circuit design; integrated circuit manufacture; integrated circuit testing; process control; designer perspective; manufacturing for design; overall electrical performance; process control; process electrical signature; strategically chosen wafer electrical tests; technology tables; Condition monitoring; Control charts; Data analysis; Manufacturing processes; Process control; Process design; Production; Semiconductor device manufacture; Semiconductor device modeling; Testing;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1998. 1998 IEEE/SEMI
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-4380-8
DOI :
10.1109/ASMC.1998.731551
