Title :
Yield management for development and manufacture of integrated circuits
Author :
Koyama, Hiroshi ; Inokuchi, Masayuki
Author_Institution :
JEOL Ltd., Tokyo, Japan
Abstract :
The purpose of this paper is to outline a strategic element of yield management methodologies for the development and fabrication of advanced ULSI circuits. Fundamental ideas with regard to knowledge conversion and a detailed yield management system are described
Keywords :
ULSI; failure analysis; fault location; integrated circuit design; integrated circuit testing; integrated circuit yield; production testing; IC development; IC manufacture; ULSI circuits; integrated circuits; knowledge conversion; strategic element; yield management; yield management methodologies; yield management strategy; yield management system; Computer integrated manufacturing; Failure analysis; Image analysis; Inspection; Integrated circuit manufacture; Integrated circuit yield; Knowledge management; Manufacturing processes; Semiconductor device manufacture; Technology management;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1998. 1998 IEEE/SEMI
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-4380-8
DOI :
10.1109/ASMC.1998.731555
