DocumentCode
2361324
Title
Yield management for development and manufacture of integrated circuits
Author
Koyama, Hiroshi ; Inokuchi, Masayuki
Author_Institution
JEOL Ltd., Tokyo, Japan
fYear
1998
fDate
23-25 Sep 1998
Firstpage
208
Lastpage
211
Abstract
The purpose of this paper is to outline a strategic element of yield management methodologies for the development and fabrication of advanced ULSI circuits. Fundamental ideas with regard to knowledge conversion and a detailed yield management system are described
Keywords
ULSI; failure analysis; fault location; integrated circuit design; integrated circuit testing; integrated circuit yield; production testing; IC development; IC manufacture; ULSI circuits; integrated circuits; knowledge conversion; strategic element; yield management; yield management methodologies; yield management strategy; yield management system; Computer integrated manufacturing; Failure analysis; Image analysis; Inspection; Integrated circuit manufacture; Integrated circuit yield; Knowledge management; Manufacturing processes; Semiconductor device manufacture; Technology management;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 1998. 1998 IEEE/SEMI
Conference_Location
Boston, MA
ISSN
1078-8743
Print_ISBN
0-7803-4380-8
Type
conf
DOI
10.1109/ASMC.1998.731555
Filename
731555
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