Measuring the divergence of laser beams to correct interferometric displacement measurements

Author

Sasso, C.P. ; Palmisano, Carlo ; Massa, Ernesto ; Mana, G.

Author_Institution

Ist. Naz. di Ricerca Metrol., Turin, Italy

fYear

2014

fDate

24-29 Aug. 2014

Firstpage

204

Lastpage

205

Abstract

Owing to the impossibility of a plane-wave illumination, diffraction affects optical interferometry applied to the measuring of linear displacement. Therefore, the measurement of the beam divergence is essential to calculate the needed corrections. This paper examines a measurement method relying on the Fourier optics. Particular emphasis is given to the assessment of systematic errors in the measurement of the Si lattice parameter by combined X-ray and optical interferometry.

Keywords

Fourier transform optics; X-ray optics; displacement measurement; laser beams; laser variables measurement; lattice constants; light interferometry; measurement errors; Fourier optics; combined X-ray-optical interferometry; interferometric displacement measurements; laser beam divergence measurement; lattice parameter; systematic error assessment; Atmospheric measurements; Laser beams; Lenses; Measurement by laser beam; Optical diffraction; Optical interferometry; Optical variables measurement; Diffraction; Laser interferometry; Measurement of laser-beam divergence;

fLanguage

English

Publisher

ieee

Conference_Titel

Precision Electromagnetic Measurements (CPEM 2014), 2014 Conference on

Conference_Location

Rio de Janeiro

ISSN

0589-1485

Print_ISBN

978-1-4799-5205-2

Type

conf

DOI

10.1109/CPEM.2014.6898330

Filename

6898330