DocumentCode
236149
Title
Nearfield scanning microwave microscopes
Author
Hoffmann, J.
Author_Institution
Fed. Inst. of Metrol. METAS, Bern-Wabern, Switzerland
fYear
2014
fDate
24-29 Aug. 2014
Firstpage
218
Lastpage
219
Abstract
This paper presents an overview of the applications of near field scanning microwave microscopes. The difficulties and approaches to obtain calibrated and traceable measurements with a scanning microwave microscope are discussed.
Keywords
calibration; microwave devices; near-field scanning optical microscopy; optical microscopes; calibration; near field scanning microwave microscope; Battery charge measurement; Dielectric measurement; Microscopy; Microwave imaging; Microwave measurement; Microwave theory and techniques; Semiconductor device measurement; S-parameters; circuit theory; near field scanning microwave microscope (NSMM); pertubation theory; traceability;
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements (CPEM 2014), 2014 Conference on
Conference_Location
Rio de Janeiro
ISSN
0589-1485
Print_ISBN
978-1-4799-5205-2
Type
conf
DOI
10.1109/CPEM.2014.6898337
Filename
6898337
Link To Document