Title :
Novel multi-channel SAW tool for the analysis of gas-phase adsorption
Author :
Ansimkin, I.V. ; Anisimkin, V.I. ; Hickernell, F.S.
Author_Institution :
Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia
Abstract :
By considering the 6 most popular planes of quartz and LiNbO3 , a multi-channel SAW analytical tool for sensing is optimized. The best anisotropy conditions for the SAW velocity, elastic displacement, electric coupling, and temperature sensitivity are found to be on the ST-plane of the former and 128°Y-rotated plane of the latter with orientation of the channels at 0°, -33°, +47° and θ = 0°, 46°, 80°, 115° off x-axis respectively. Based on the optimized orientations, two novel prototypes were fabricated using photomasks integrating all the channels on a single plate. The anisotropy of different channels of the tools was tested for uncoated and PVA coated substrates, both for humid air, as the example. The difference in SAW responses and in the calibration curves of the channels was found to be sufficient to make an appropriate analysis of gas-phase adsorption. The largest number of channels on a substrate was found to be 5
Keywords :
adsorption; gas sensors; lithium compounds; quartz; surface acoustic wave sensors; LiNbO3; LiNbO3 substrate; PVA coating; SAW velocity; SiO2; anisotropy; calibration curve; channel orientation; elastic displacement; electric coupling; gas phase adsorption; humid air; multi-channel SAW sensor; photomask fabrication; quartz substrate; temperature sensitivity; Anisotropic magnetoresistance; Conductive films; Conductivity; Couplings; Piezoelectric films; Sensor arrays; Substrates; Surface acoustic waves; Temperature sensors; Transducers;
Conference_Titel :
Ultrasonics Symposium, 2001 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
0-7803-7177-1
DOI :
10.1109/ULTSYM.2001.991636
