DocumentCode
2361855
Title
Acoustic HBAR spectroscopy of metal (W, Ti, Mo, Al) thin films
Author
Mansfeld, G.D. ; Alekseev, S.G. ; Kotelyansky, I.M.
Author_Institution
Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia
Volume
1
fYear
2001
fDate
2001
Firstpage
415
Abstract
The method of HBAR spectroscopy of thin films was modified and applied for acoustic characterization of W, Ti, Mo, and Al films. The results of the measurements of attenuation coefficient and sound velocity in these materials are presented
Keywords
acoustic wave absorption; acoustic wave velocity; metallic thin films; Al; Mo; Ti; W; acoustic HBAR spectroscopy; attenuation coefficient; high overtone bulk acoustic wave spectroscopy; metal thin film; sound velocity; Acoustic materials; Acoustic waves; Attenuation measurement; Electrodes; Loss measurement; Piezoelectric films; Resonant frequency; Spectroscopy; Substrates; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2001 IEEE
Conference_Location
Atlanta, GA
Print_ISBN
0-7803-7177-1
Type
conf
DOI
10.1109/ULTSYM.2001.991652
Filename
991652
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