• DocumentCode
    2361932
  • Title

    Temperature sensitivity of plate modes in ST quartz

  • Author

    Anisimkin, I.V. ; Gulyaev, Yu.V. ; Anisimkin, V.I. ; Verona, E.

  • Author_Institution
    Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia
  • Volume
    1
  • fYear
    2001
  • fDate
    2001
  • Firstpage
    423
  • Abstract
    On considering 13 modes with shear horizontal (SH) polarization, propagating perpendicular to the x-axis in a ST quartz plate, it is experimentally shown and theoretically verified how the temperature coefficient of delay (TCD) and its behavior vs. temperature depend monotonically on the order n of the mode. This property is attributed to the different sensitivities of the modes towards temperature variations in c12, c14 and c44 elastic moduli. The modes sensitivities towards density ρ, elastic moduli c11, c13, c33 and plate thickness h are either temperature independent or negligibly small. The best thermal stability (TCD≈0) over the widest temperature range (2-92°C) has been detected for the 6th mode, while the largest one (350 ppm/°C) has been measured for the 13th mode, at 47°C. For comparison, five Lamb modes, propagating along the x-direction in the same quartz plate, show a non monotonic dependence of the thermal coefficient on the mode number, a temperature independent TCD in the range 2-92°C, a minimum and maximum value of the TCD (≈0.7 ppm/°C and ≈100 ppm/°C) for the 0th symmetric mode and for the 1st anti-symmetric mode, respectively
  • Keywords
    quartz; surface acoustic wave devices; thermal stability; 2 to 92 C; Lamb mode; ST-quartz; SiO2; acoustic wave device; density; elastic moduli; plate mode; shear horizontal polarization; temperature coefficient of delay; temperature sensitivity; thermal coefficient; thermal stability; Acoustic propagation; Acoustic waves; Frequency; Propagation delay; Substrates; Temperature control; Temperature dependence; Temperature distribution; Temperature sensors; Thermal conductivity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2001 IEEE
  • Conference_Location
    Atlanta, GA
  • Print_ISBN
    0-7803-7177-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2001.991654
  • Filename
    991654