A high power ultrasonic linear motor with a longitudinal-bending hybrid transducer for high-speed and precise drive of a heavy stage

Author

Yun, Cheol-Ho ; Ishii, Takaaki ; Nakamura, Kentaro ; Ueha, Sadayuki ; Akashi, Koji

Author_Institution

Precision & Intelligence Lab., Tokyo Inst. of Technol., Yokohama, Japan

Volume

1

fYear

2001

fDate

2001

Firstpage

537

Abstract

This paper presents a holding system for a longitudinal-bending hybrid transducer linear motor in order to achieve operational stability, and utilizes a PID feedback control system for precise positioning by the proposed ultrasonic linear motor. The holding system can hold the motor firmly, but does not affect the longitudinal and bending vibration modes. By using the new supporting system, the residual vibrations of the stage have been reduced by 20 times compared to that of previous results, and the settling time has been remarkably shortened. Incorporating the present motor into a PID feedback control system, it was possible to position the 10-kg-stage at speed of 200 mm/s with the accuracy of 50 nm

Keywords

feedback; linear motors; machine control; stability; three-term control; ultrasonic motors; ultrasonic transducers; 10 kg; 200 mm/s; PID feedback control system; heavy stage; high-speed drive; holding system; longitudinal-bending hybrid transducer; operational stability; residual vibrations; settling time; ultrasonic linear motor; Ceramics; Electromagnetic fields; Feedback control; Force control; Resonance; Resonant frequency; Stability; Three-term control; Ultrasonic transducers; Vibration control;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2001 IEEE

Conference_Location

Atlanta, GA

Print_ISBN

0-7803-7177-1

Type

conf

DOI

10.1109/ULTSYM.2001.991679

Filename

991679