Title :
RF-MEMS dielectric charging: Dependence on dielectric film polarization procedures
Author :
Papaioannou, George ; Papapolymerou, John ; Pons, Patrick ; Plana, Robert
Author_Institution :
Georgia Inst. of Technol., Atlanta
Abstract :
The paper demonstrates the advantages arising from the simultaneous assessment of RF-MEMS capacitive switches and MIM capacitors. The application of simple capacitive-voltage characteristics and thermally stimulated depolarization current methods, respectively, allow the discrimination of the contribution of injected charges induced space charge polarization and the dipolar polarization. The proposed method allows the direct determination of device degradation sources and can be used for the dielectric material improvement.
Keywords :
MIM devices; capacitors; dielectric polarisation; micromechanical devices; space charge; MIM capacitors; RF-MEMS; capacitive switches; depolarization current method; dielectric charging; dielectric film polarization; dielectric material improvement; dipolar polarization; space charge polarization; Dielectric devices; Dielectric films; Dielectric materials; Lattices; MIM capacitors; Micromechanical devices; Polarization; Radiofrequency microelectromechanical systems; Space charge; Switches; Dielectrics polarization; microelectromechanical devices; reliability; surface charging;
Conference_Titel :
AFRICON 2007
Conference_Location :
Windhoek
Print_ISBN :
978-1-4244-0987-7
Electronic_ISBN :
978-1-4244-0987-7
DOI :
10.1109/AFRCON.2007.4401447
