DocumentCode :
236267
Title :
A broadband electromagnetic characterization of Ba0.7Sr0.3TiO3 thin films on coplanar waveguide up to microwave frequencies
Author :
Ndiaye-Tandia, Oumy ; Charles, Michael ; Allal, Djamel ; Bocquet, Bertrand
Author_Institution :
Lab. Nat. de Metrol. et d´Essais, Trappes, France
fYear :
2014
fDate :
24-29 Aug. 2014
Firstpage :
342
Lastpage :
343
Abstract :
A method for determining the electromagnetic properties of Ba0.7Sr0.3TiO3 (BST) thin films is presented in this paper. At first we introduce a broadband characterization method based on the extraction of the intrinsic properties of a substrate from the measurement of a kit composed of five coplanar waveguides and then we employed an accurate on wafer TRL calibration technique to measure the permittivity of the BST thin film.
Keywords :
barium compounds; calibration; coplanar waveguides; ferroelectric thin films; microwave materials; microwave measurement; permittivity measurement; strontium compounds; BST thin film; Ba0.7Sr0.3TiO3; broadband electromagnetic characterization; coplanar waveguide; intrinsic property extraction; microwave frequency; permittivity measurement; wafer TRL calibration technique; Coplanar waveguides; Electromagnetic waveguides; Microwave circuits; Permittivity; Permittivity measurement; Substrates; Transmission line measurements; BST; Permittivity; S parameters; coplanar waveguide; ferroelectrics;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Precision Electromagnetic Measurements (CPEM 2014), 2014 Conference on
Conference_Location :
Rio de Janeiro
ISSN :
0589-1485
Print_ISBN :
978-1-4799-5205-2
Type :
conf
DOI :
10.1109/CPEM.2014.6898399
Filename :
6898399
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=236267
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