A multimedia expert system for wafer polisher maintenance

Author

Hekmatpour, Amir ; Elkan, Charles

Author_Institution

IBM, Essex Junction, VT, USA

fYear

1993

fDate

1-5 Mar 1993

Firstpage

453

Abstract

Summary form only given. WESDA is an intelligent diagnostic system that assists in troubleshooting highly complex machines for polishing silicon wafers. Many independent OS/2 applications have been integrated into WESDA to present information in the most effective way possible to users. WESDA´s knowledge base is organized in a modular way, and its inference architecture combines problem-solving by classification and by case retrieval. The system has already proved to be very useful for identifying fault components, for recommending whether these should be repaired or replaced, and for advising on tool precision adjustments

Keywords

diagnostic expert systems; integrated circuit manufacture; maintenance engineering; multimedia computing; polishing; semiconductor technology; WESDA; inference architecture; intelligent diagnostic system; knowledge base; multimedia expert system; tool precision adjustments; troubleshooting; wafer polisher maintenance; Application software; Diagnostic expert systems; Expert systems; Image resolution; Intelligent systems; Multimedia systems; Navigation; Postal services; Slurries; Software packages;

fLanguage

English

Publisher

ieee

Conference_Titel

Artificial Intelligence for Applications, 1993. Proceedings., Ninth Conference on

Conference_Location

Orlando, FL

Print_ISBN

0-8186-3840-0

Type

conf

DOI

10.1109/CAIA.1993.366630

Filename

366630