Fabrication of an integrated spiral-type inductor dedicated to DC-DC microconverters

Author

Laur, J.-P. ; Troussier, Gh ; Sanchez, J.-L. ; Bourrier, D. ; Conedera, V. ; Dilhan, M. ; El Mastouli, T. ; Lembeye, Y. ; Morel, H. ; Ligot, D. ; Cogitore, B.

Author_Institution

LAAS, Toulouse

fYear

2005

fDate

11-14 Sept. 2005

Abstract

This paper describes the fabrication steps of a spiral-type inductor designed for power electronics conversion. Realized on silicon wafer and using photolithography and electroplating techniques, this microinductor is composed of a copper spiral conductor sandwiched between two iron-nickel laminated magnetic layers. Furthermore, specific devices have been realized in order to characterize the magnetic material

Keywords

DC-DC power convertors; conductors (electric); electroplating; inductors; laminations; photolithography; DC-DC microconverters; copper spiral conductor; electroplating techniques; integrated spiral-type inductor fabrication; iron-nickel laminated magnetic layers; magnetic material; microinductors; photolithography; power electronics conversion; silicon wafer; Buck converters; Conducting materials; Copper; Fabrication; Inductors; Magnetic cores; Magnetic materials; Saturation magnetization; Spirals; Voltage; Magnetic device; Monolithic power integration; Passive component;

fLanguage

English

Publisher

ieee

Conference_Titel

Power Electronics and Applications, 2005 European Conference on

Conference_Location

Dresden

Print_ISBN

90-75815-09-3

Type

conf

DOI

10.1109/EPE.2005.219660

Filename

1665850