Title :
Electromagnetic analysis of micromachined devices
Author :
Carbonell, J. ; Danglot, J. ; Mélique, X. ; Dupuis, O. ; Lheurette, E. ; Mounaix, P. ; Vanbésien, O. ; Lippens, D.
Author_Institution :
Inst. d´´Electron et de Microelectron. du Nord, Univ. des Sci. et Tech. de Lille Flandres Artois, Villeneuve d´´Ascq, France
Abstract :
In this paper, the electromagnetic behaviour of micromachined devices aimed at operating at terahertz frequency is specially addressed. We considered respectively: (i) new fabrication techniques for free-standing air-bridged structures for planar device arrays; (ii) high-speed low-loss coplanar wave guides deposited on a membrane in GaAs technology; (iii) metallic/air photonic band gap structures used in filtering and guiding sections; and (iv) a radiating antenna deposited on low temperature grown GaAs used in pulse optical techniques for Terahertz generation
Keywords :
coplanar waveguide components; electromagnetic field theory; gallium arsenide; membranes; micromachining; microwave photonics; photonic band gap; submillimetre wave devices; EM analysis; GaAs; GaAs technology; THz generation; coplanar wave guides; electromagnetic analysis; fabrication techniques; filtering sections; free-standing air-bridged structures; guiding sections; high-speed low-loss CPW; low temperature grown GaAs; membrane; metallic/air PBG structures; micromachined devices; photonic band gap structures; planar device arrays; pulse optical techniques; radiating antenna; terahertz frequency operation; Antenna arrays; Biomembranes; Electromagnetic analysis; Electromagnetic devices; Fabrication; Frequency; Gallium arsenide; Optical arrays; Optical filters; Optical pulse generation;
Conference_Titel :
Terahertz Electronics Proceedings, 1998. THz Ninety Eight. 1998 IEEE Sixth International Conference on
Conference_Location :
Leeds
Print_ISBN :
0-7803-4903-2
DOI :
10.1109/THZ.1998.731661
