• DocumentCode
    236352
  • Title

    Null detector and AC voltage reference based on MEMS

  • Author

    Manninen, A.J. ; Helisto, P. ; Sipola, H. ; Roschier, L. ; Iisakka, I. ; Immonen, P.

  • Author_Institution
    Centre for Metrol. & Accreditation (MIKES), Espoo, Finland
  • fYear
    2014
  • fDate
    24-29 Aug. 2014
  • Firstpage
    424
  • Lastpage
    425
  • Abstract
    This paper describes our work with two applications of microelectromechanical systems (MEMS): a sensitive voltmeter that can be used e.g. as a null detector, and a stand-alone AC voltage reference. Both applications are based on the pull-in effect in a moving-plate capacitor.
  • Keywords
    capacitors; electric current measurement; microsensors; reference circuits; voltage measurement; voltmeters; MEMS; microelectromechanical system; moving-plate capacitor; null detector; pull-in effect; stand-alone AC voltage reference; voltmeter; Detectors; Micromechanical devices; Noise; Thermal stability; Voltage measurement; Microelectromechanical systems (MEMS); null detector; voltage measurement; voltage reference;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Precision Electromagnetic Measurements (CPEM 2014), 2014 Conference on
  • Conference_Location
    Rio de Janeiro
  • ISSN
    0589-1485
  • Print_ISBN
    978-1-4799-5205-2
  • Type

    conf

  • DOI
    10.1109/CPEM.2014.6898440
  • Filename
    6898440
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=236352