Title :
Null detector and AC voltage reference based on MEMS
Author :
Manninen, A.J. ; Helisto, P. ; Sipola, H. ; Roschier, L. ; Iisakka, I. ; Immonen, P.
Author_Institution :
Centre for Metrol. & Accreditation (MIKES), Espoo, Finland
Abstract :
This paper describes our work with two applications of microelectromechanical systems (MEMS): a sensitive voltmeter that can be used e.g. as a null detector, and a stand-alone AC voltage reference. Both applications are based on the pull-in effect in a moving-plate capacitor.
Keywords :
capacitors; electric current measurement; microsensors; reference circuits; voltage measurement; voltmeters; MEMS; microelectromechanical system; moving-plate capacitor; null detector; pull-in effect; stand-alone AC voltage reference; voltmeter; Detectors; Micromechanical devices; Noise; Thermal stability; Voltage measurement; Microelectromechanical systems (MEMS); null detector; voltage measurement; voltage reference;
Conference_Titel :
Precision Electromagnetic Measurements (CPEM 2014), 2014 Conference on
Conference_Location :
Rio de Janeiro
Print_ISBN :
978-1-4799-5205-2
DOI :
10.1109/CPEM.2014.6898440
