DocumentCode
2364357
Title
Towards THz SiGe HBTs
Author
Chevalier, P. ; Meister, T.F. ; Heinemann, B. ; Van Huylenbroeck, S. ; Liebl, W. ; Fox, A. ; Sibaja-Hernandez, A. ; Chantre, A.
Author_Institution
STMicroelectron., Crolles, France
fYear
2011
fDate
9-11 Oct. 2011
Firstpage
57
Lastpage
65
Abstract
This paper summarizes the technological developments carried out on SiGe HBTs in the frame of the European project DOTFIVE. The architectures of the different partners and their performances are presented and discussed showing that the project objectives have been met.
Keywords
Ge-Si alloys; heterojunction bipolar transistors; millimetre wave transistors; European project DOTFIVE; SiGe; heterojunction bipolar transistors; millimetre wave transistors; Epitaxial growth; Fabrication; Heterojunction bipolar transistors; Resistance; Silicon carbide; Silicon germanium; Heterojunction bipolar transistors; Millimeter wave transistors; Silicon germanium;
fLanguage
English
Publisher
ieee
Conference_Titel
Bipolar/BiCMOS Circuits and Technology Meeting (BCTM), 2011 IEEE
Conference_Location
Atlanta, GA
ISSN
1088-9299
Print_ISBN
978-1-61284-165-6
Type
conf
DOI
10.1109/BCTM.2011.6082749
Filename
6082749
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