Title :
SnO2, SnO2/Ag and Ag/SnO2 thin films used as propane sensors
Author :
Aguilar, J. ; Olvera, Mdl.L. ; Maldonado, A.
Author_Institution :
Departamento de Ingenieria Electrica, CINVESTAV-IPN, Mexico, Mexico
Abstract :
Three different structures SnO2, SnO2/Ag and Ag/SnO2 on glass substrates were performed. The SnO2 and Ag films were deposited by the chemical spray technique (spray pyrolysis), and vacuum evaporation, respectively. In this work the films sensitivity in a propane atmosphere, C3H8, at different operation temperatures are reported. According to our results the SnO2/Ag structure showed the highest sensitivity.
Keywords :
gas sensors; organic compounds; silver; spray coatings; thin film devices; tin compounds; Ag; SnO2; SnO2-Ag; chemical spray technique; gas sensors; glass substrates; propane atmosphere; propane sensors; spray pyrolysis; thin films; vacuum evaporation; Atmosphere; Chemicals; Gas detectors; Glass; Sensor arrays; Spraying; Sputtering; Substrates; Thin film sensors; Tin; gas sensors; propane; thin films; tin oxide;
Conference_Titel :
Electrical and Electronics Engineering, 2005 2nd International Conference on
Print_ISBN :
0-7803-9230-2
DOI :
10.1109/ICEEE.2005.1529620