DocumentCode
2364613
Title
Computational Lithography - Moore Bang for your Buck
Author
Singh, Vivek
fYear
2009
fDate
5-9 Jan. 2009
Firstpage
9
Lastpage
9
Keywords
Computational modeling; Design engineering; Design for manufacture; Humans; Lithography; Moore´s Law; Physics computing; Plasma simulation; Technological innovation; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Design, 2009 22nd International Conference on
Conference_Location
New Delhi, India
ISSN
1063-9667
Print_ISBN
978-0-7695-3506-7
Type
conf
DOI
10.1109/VLSI.Design.2009.106
Filename
4749636
Link To Document