Title :
Computational Lithography - Moore Bang for your Buck
Keywords :
Computational modeling; Design engineering; Design for manufacture; Humans; Lithography; Moore´s Law; Physics computing; Plasma simulation; Technological innovation; Very large scale integration;
Conference_Titel :
VLSI Design, 2009 22nd International Conference on
Conference_Location :
New Delhi, India
Print_ISBN :
978-0-7695-3506-7
DOI :
10.1109/VLSI.Design.2009.106
