Title :
Quantum Hall devices based on single-crystalline graphene
Author :
Wang Xueshen ; Li Jinjin ; Zhong Qing ; Zhong Yuan ; Liu Yonggang
Author_Institution :
Nat. Inst. of Metrol., Beijing, China
Abstract :
Large scale single-crystalline graphene was achieved on copper foils with CH4 as the precursor with a sandwich method. With a PMMA-assisted method, single-crystalline graphene was transferred to the marked SiO2/Si substrate. Quantum Hall devices will be fabricated by E-beam lithography and metallization. And, quantum Hall effect will be measured.
Keywords :
copper; electron beam lithography; foils; graphene; metallisation; quantum Hall effect; C; Cu; E-beam lithography; PMMA-assisted method; Si; SiO2-Si; SiO2/Si substrate; copper foils; metallization; quantum Hall devices; sandwich method; single-crystalline graphene; Graphene; Hall effect; Resistance; Silicon; Standards; Substrates; Surface treatment; Graphene; Quantum Hall devices; single-crystalline;
Conference_Titel :
Precision Electromagnetic Measurements (CPEM 2014), 2014 Conference on
Conference_Location :
Rio de Janeiro
Print_ISBN :
978-1-4799-5205-2
DOI :
10.1109/CPEM.2014.6898497
