“Green” process and productivity improvements in a GaAs light emitting diode wafer fab

Author

Evans, Keenan ; Alcorn, Terry ; Hadizad, Peyman ; Edwards, Keith ; Fischer, Roland ; Nielsen, Donna ; Richie, Frank ; Saha, Naresh

Author_Institution

CPSTG, Motorola Inc., Phoenix, AZ, USA

fYear

1995

fDate

1-3 May 1995

Firstpage

253

Lastpage

258

Abstract

A self directed process improvement team was initiated to streamline the GaAs light emitting diode (LED) wafer process flow and enhance product yields. “Green” benefits of this study to improve GaAs LED wafer processing yields included the elimination of a significant number of chemical processing steps. The new process is more environmentally “friendly” through the use of fewer and “milder” chemicals. Thus wafer production is enhanced with both a yield increase and a cost decrease due to lower levels of chemical usage

Keywords

III-V semiconductors; circuit optimisation; economics; environmental factors; gallium arsenide; human resource management; integrated circuit yield; light emitting diodes; semiconductor device manufacture; GaAs; chemical usage levels; cost decrease; environmentally friendly process; light emitting diode; process flow; product yields; productivity improvements; self directed process improvement team; wafer fab; Chemical processes; Electrons; Etching; Gallium arsenide; Light emitting diodes; Oxidation; Productivity; Surface cleaning; Surface contamination; Zinc;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics and the Environment, 1995. ISEE., Proceedings of the 1995 IEEE International Symposium on

Conference_Location

Orlando, FL

Print_ISBN

0-7803-2137-5

Type

conf

DOI

10.1109/ISEE.1995.514985

Filename

514985