DocumentCode
2365156
Title
Improved bulk wave resonator coupling coefficient for wide bandwidth filters
Author
Lakin, M. ; Belsick, J. ; McDonald, J.F. ; McCarron, K.T.
Author_Institution
TFR Technol., Inc, Bend, OR, USA
Volume
1
fYear
2001
fDate
2001
Firstpage
827
Abstract
Resonator coupling coefficient plays a key role in determining the bandwidth of acoustically or electrically coupled resonator filters. This paper presents a method using high mechanical impedance electrodes to increase the effective coupling coefficient for bulk acoustic wave (BAW) resonators in the solidly mounted resonator (SMR) or membrane (FBAR) configurations
Keywords
acoustic resonator filters; bulk acoustic wave devices; electric impedance; equivalent circuits; membranes; BAW resonators; FBAR configurations; SMR configurations; acoustically coupled resonator filters; bandwidth; bulk acoustic wave resonators; bulk wave resonator coupling coefficient; electrically coupled resonator filters; high mechanical impedance electrodes; membrane configurations; solidly mounted resonator; wide bandwidth filters; Bandwidth; Coupling circuits; Electrodes; Film bulk acoustic resonators; Inductors; Resonance; Resonant frequency; Resonator filters; Temperature; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2001 IEEE
Conference_Location
Atlanta, GA
Print_ISBN
0-7803-7177-1
Type
conf
DOI
10.1109/ULTSYM.2001.991848
Filename
991848
Link To Document