Title :
Micromachined unimorphs and bimorphs
Author :
Farlow, Roger ; Galbraith, Walter ; Kelly, Stephen ; Hayward, Gordon
Author_Institution :
Dept. of Electron. & Electr. Eng., Strathclyde Univ., Glasgow, UK
Abstract :
A frequency doubled copper vapour laser (CVL) operating at an ultraviolet wavelength of 271 nm has been used to cut miniature cantilevers in laminated composites incorporating at least one layer of the ferroelectric polymer polyvinylidene fluoride (PVDF). Devices have been fabricated from PVDF with thickness values in the range 9 μm to 38 μm. Laser vibrometer measurements show that the fundamental resonance frequencies of these devices correspond almost exactly with values obtained from mechanical beam theory. Ultrasonic transducers consisting of bimorph and unimorph arrays are currently being designed with the aid of a finite element model, which is not discussed
Keywords :
finite element analysis; laser beam machining; measurement by laser beam; micromachining; piezoelectric transducers; ultrasonic transducer arrays; 271 nm; 9 to 38 micron; ferroelectric polymer; finite element model; frequency doubled copper vapour laser; fundamental resonance frequencies; laminated composites; laser vibrometer measurements; mechanical beam theory; micromachined bimorphs; micromachined unimorphs; miniature cantilevers; piezocomposite transducers; polyvinylidene fluoride; ultrasonic transducers; ultraviolet wavelength; Copper; Ferroelectric materials; Frequency measurement; Laser beam cutting; Laser modes; Laser theory; Mechanical variables measurement; Polymers; Ultrasonic transducer arrays; Vibrometers;
Conference_Titel :
Ultrasonics Symposium, 2001 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
0-7803-7177-1
DOI :
10.1109/ULTSYM.2001.991868
